Encycl physsci technol 2001 academic press 1 ion beams for materials analysis david d cohen roger bird nick dytlewski and rainer siegele australian nuclear . Ion beam analysis iba using mev ion beams for compositional and structural determination of materials combines the advantages of non destructive and standardless . Abstract this book discusses ion beams for materials analysis topics covered include ion induced x ray emission channeling and depth profiling of surface layers . Focused ion beam also known as fib is a technique used particularly in the semiconductor industry materials science and increasingly in the biological field for
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